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Plasma Monitoring

Plasma Ball

Modular spectroscopy components are excellent tools for acquiring plasma emission spectra in real time from a plasma chamber. Plasma characteristics determined from these emission spectra can be used for monitoring and controlling plasma-based processes.

Plasma monitoring can be achieved with a flexible, modular setup using a spectrometer like our high-resolution HR4000 model or the UV-sensitive Maya2000 Pro, or with a fully integrated system like the PlasCalc plasma monitoring system. If quantitative measurements are desired for plasma control, the integrated PlasCalc system with its advanced process control systems and sophisticated data acquisition algorithms is your best option. Components for high-volume OEM applications are also available.


Featured:

PlasCalc Plasma Monitor

PlasCalc Plasma Monitor

Fully integrated system for real-time, in situ analysis of optical emission spectra acquired during plasma processes.

Example Setup: Plasma Monitoring

Overview

Plasma is an energized, gas-like state where a fraction of the atoms have been excited or ionized to form free electrons and ions. Plasma is used in a range of applications including elemental analysis, film deposition, plasma etching and surface cleaning. By monitoring the emission spectrum of the sample plasma, we are able to determine critical plasma parameters required for controlling plasma-based processes. The wavelengths of the emission lines are used to identify the elements present in the plasma with emission line intensity used to quantify particle and electron densities in real time.

Spectrometer

Plasma monitoring can be accomplished using a flexible, modular setup (as described here) or a fully integrated system such as the PlasCalc Plasma Monitoring system. For our example setup, we selected an HR2000+ high-resolution spectrometer configured with an HC-1 grating (200-1050 nm), 25 µm slit and variable longpass filter (DET2B-200-1100).

Sampling Accessories

Your choice of sampling accessories depends on factors such as sampling position (inside or outside the vacuum) and chamber conditions. For in-vacuum applications, we offer both flange-type and O-ring vacuum feedthrough options and related accessories. In our example setup, we coupled a 400 µm solarization-resistant optical fiber (QP400-2-SR-BX) to a CC-3-UV-S cosine corrector, which is placed against the viewport of the plasma chamber. A large-diameter collimating lens like our COL-UV-30 is one of several alternatives to the cosine corrector.

Software

OceanView spectroscopy software completes the system. Also available is SpecLine software, a program designed for identifying atomic emission lines and molecular bands in spectral data.

Plasma Monitoring System Components

HR2000+ High-resolution spectrometer configured with an extended-range grating (200-1050 nm), 25 µm slit and variable longpass filter and quartz window (DET2B-200-1100)
CC-3-UV-S Cosine corrector with Spectralon diffusing material; responsive from ~200-2500 nm
QP400-2-SR-BX Premium-grade, solarization resistant optical fiber; 400 µm diameter, 2 m length, stainless steel BX jacketing
OceanView Spectroscopy operating software

Example Setup: Plasma Monitoring

Spectra-Argon-Plasma-after-Addition-of-Hydrogen-Gas

Adding hydrogen gas to argon plasma changes its spectral properties.

Spectra-Argon-Plasma-Emission

Emission of argon plasma is measured through a vacuum chamber window.

Spectra-Argon-Plasma-without-Sheath-Gas-Added

Argon plasma emission is measured in the vacuum chamber before the addition of sheath gas.

Spectra-Argon-Plasma-with-Sheath-Gas-Added

With the addition of sheath gas, argon emission characteristics are noticeably different below 400 nm and at ~520 nm.

Plasma Monitoring Plasma Monitoring Plasma Monitoring Plasma Monitoring Plasma Monitoring
STS Developers Kit

STS Developers Kit

Connect, Code, Create with New Sensing Tools
Maya LSL Spectrometer

Maya LSL Spectrometer

Low Stray Light with High Sensitivity
HR4000 (Custom)

HR4000 (Custom)

High Resolution Spectrometer for Maximum Flexibility
QE Pro-ABS

QE Pro-ABS

High-sensitivity Spectrometer for Absorbance
EMBED Spectrometer

EMBED Spectrometer

Robust, Stable Spectrometer for OEM Applications
USB2000+XR1

USB2000+XR1

Extended Range Spectrometer for UV-NIR applications
HR4000CG-UV-NIR

HR4000CG-UV-NIR

High Resolution Spectrometer for Biological and Chemical Applications
QE Pro-FL

QE Pro-FL

High-sensitivity Spectrometer for Fluorescence
NIRQuest (Custom)

NIRQuest (Custom)

Custom configured for Near-Infrared Measurements
Laser Induced Breakdown Spectroscopy (LIBS)

Laser Induced Breakdown Spectroscopy (LIBS)

High-resolution Spectrometers for Modular LIBS Systems
USB2000+XR1-ES

USB2000+XR1-ES

Extended Range Spectrometer for UV-NIR applications with Enhanced Sensitivity
bluLoop

bluLoop

Multi-LED Light Source
74-series Collimating Lenses

74-series Collimating Lenses

Single and Achromatic Lenses
MPM-2000 Optical Multiplexer

MPM-2000 Optical Multiplexer

Routing Light in Your Spectrometer Setup
21-01

21-01

SMA Bulkhead Bushing